AMOD
Explore Angstrom's AMOD PVD platform, versatile with larger chamber distances and advanced process enhancements for research and production.
广西科米瑞实验仪器设备有限公司生产销售 Angstrom Engineering AMOD，可提供产品参数、报价和售后服务咨询，价格面议。
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This PVD platform begins to allow for larger chamber throw distances, and the ability to accommodate more process enhancements.
Your research goals, production demands, and/or application end goals will inform how to outfit your Amod PVD platform.
Let’s work together to design the system that will be perfectly suited to your requirements.
SYSTEM BUILD OPTIONS
System Model Features
Sputtering
RF, DC, pulsed DC, HIPIMS, and reactive.
Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
Utilize a wide range of boats, filaments & crucible heaters.
Auto-tuning for precise rate control.
Electron Beam Evaporation
Wide range of source power and power supply options available.
Programmable sweep controller with recipe storage.
Torque sensing crucible indexer detects pocket jams.
Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.
Fixturing & Automation
Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.
Substrate Fixturing Enhancements
Substrate and Shadow Mask Automation Options
Advanced Process Control Software
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