ASM International SONORA 300 mm 批量立式炉
SONORA
SONORA 是 ASM 面向逻辑、代工、存储器以及 300 mm 模拟和功率应用的 300 mm 批量立式炉。
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说明
SONORA 是 ASM 面向逻辑、代工、存储器以及 300 mm 模拟和功率应用的 300 mm 批量立式炉。
规格参数
- 型号：SONORA
- 产品名称：SONORA®
- SONORA is a 300 mm batch vertical furnace for logic/foundry and memory applications, as well as 300 mm analog/power. SONORA is capable of both atmospheric and low-pressure thermal wafer processing. Atmospheric thermal applications include d
规格
| 型号 | SONORA |
|---|---|
| 产品名称 | SONORA® |
| 产品说明 | SONORA is a 300 mm batch vertical furnace for logic/foundry and memory applications, as well as 300 mm analog/power. SONORA is capable of both atmospheric and low-pressure thermal wafer processing. Atmospheric thermal applications include d |
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