EBARA Dynox feat. TEOS 废气处理系统
Dynox feat. TEOS
Dynox with integrated TEOS solution is described for oxidizing pyrophoric gas compounds in exhaust gases from semiconductor processes.
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产品说明:Dynox with integrated TEOS solution is described for oxidizing pyrophoric gas compounds in exhaust gases from semiconductor processes.
主要特点:TEOS will be fully oxidized, lower explosive limit, minimum dilution, eco-friendly without water or extra gas usage.
技术信息:Developed, engineered & produced in Germany; high safety level; reacts highly flammable and pyrophoric gases.
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