EBARA LA+ 废气处理系统
LA+
EBARA LA+ 废气处理系统,为燃烧式废气处理设备,最大 airflow capacity 为 600 L/min。
广西科米瑞实验仪器设备有限公司生产销售 Ebara LA+,可提供产品参数、报价和售后服务咨询,价格面议。
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产品说明:LA+ is described for specialized gases used in semiconductor manufacturing and for reducing reactive byproducts that can affect continuous operation.
主要特点:Reduction of byproduct adhesion, reduction of NOx/COx emissions, compact design for space efficiency.
技术信息:Hydrogen fuel option; maximum airflow capacity of 600 L/min; engineered and produced in Japan.
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