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CS-620F

CS-620F

产品说明 CS-600F光纤型高温磷酸浓度计实现了更高级的功能，适合制造，以满足尖端半导体湿法工艺所需的化学药液浓度管理。

品牌: HORIBA产地: Japan交期: 按配置沟通价格: 面议服务区域: 全国

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CS-620F
说明规格FAQ

说明

产品说明

CS-600F光纤型高温磷酸浓度计实现了更高级的功能，适合制造，以满足尖端半导体湿法工艺所需的化学药液浓度管理。

规格参数

< ompensation type multivariate analysis
CS-700 High Precision, High Stability Chemical Concentration MonitorCS-600F Fiber Optic Type Chemical Concentration Monitor / HF HD-960L Dissolved Oxygen Monitor in Low Concentration
SampleH3PO4/H2O
Measurable range RepeatabilityComponent / Measurable range (mass%) / Repeatability (mass%) / Analog output range(mass%)
1st solutionH3PO4 / 85.00-92.00 / +/-0.10 / 85.00-100.00
H2O8.0-15.0 / +/-0.3 / 0.0-15.0
Conditions of Measurement1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times
Connection fitting size1 inch or 3/4 inch
Sample conditionSample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time: 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min
Air(for operation and purge)Connection port: 4 mm O.D. quick joint Pressure: 0.2 MPa ± 0.02 MPa
Power source100 to 230 V AC (Single-Phase), 50/60 Hz
Power consumptionApprox.85 VA (Transient electric current at the time of the start is excluded)
CommunicationParallel I/O, RS-232C, Analog output
Dimension(Monitor) 200 (W) × 308 (D) × 78 (H) mm (Lamp unit) 200 (W) × 262 (D) × 100 (H) mm (Sample cell) 240 (W) × 209 (D) × 205 (H) mm
Weight(Monitor) Approx.3.6 kg (Lamp unit) Approx.2.8 kg (Sample cell) Approx.3.0 kg
Ambient temperature(Monitor, Lamp unit) 20 to 30°C (Optical fiber, Sample cell) 20 to 100°C * Sudden temperature change should be avoided, within +/- 1°C/1hour
Ambient humidity(Monitor, Lamp unit) 40 to 70% (Should be no dew condensation)
Slanting angle of installation(Monitor, Lamp unit) Within +/-1 degree (Sample cell) Please install so that air bubbles do not stay up.
Optical fiberLength: 5 m, Bend radius: R150 mm

规格

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型号/名称CS-620F
CS-700 High Precision, High Stability Chemical Concentration MonitorCS-600F Fiber Optic Type Chemical Concentration Monitor / HF HD-960L Dissolved Oxygen Monitor in Low Concentration
Product nameCHEMICAL SOLUTION MONITOR
型号CS-620F
Measurement principleAbsorption spectroscopic method
Calculation principleTemperature compensation type multivariate analysis
SampleH3PO4/H2O
Measurable range RepeatabilityComponent / Measurable range (mass%) / Repeatability (mass%) / Analog output range(mass%)
1st solutionH3PO4 / 85.00-92.00 / +/-0.10 / 85.00-100.00
H2O8.0-15.0 / +/-0.3 / 0.0-15.0
Conditions of Measurement1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times
Connection fitting size1 inch or 3/4 inch
Sample conditionSample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min

FAQ