EV 2.0 系列
EV 2.0 系列
EV 2.0 专用于单腔室或多腔室配置下的光发射光谱（OES）或多波长干涉测量（INT）终点过程实时监测。规格参数 System outline The small sized spectrometer is based on a concave holographic grating (aberration corrected) with 20mm
广西科米瑞实验仪器设备有限公司生产销售 HORIBA EV 2.0 系列，可提供产品参数、报价和售后服务咨询，价格面议。
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产品说明
EV 2.0 专用于单腔室或多腔室配置下的光发射光谱（OES）或多波长干涉测量（INT）终点过程实时监测。
规格参数
| System outline | The small sized spectrometer is based on a concave holographic grating (aberration corrected) with 20mm focal length (LR) or 75 mm focal length (STD, HR) and 50µm slit. The spectrometer is attached to a window of the Tool chamber or through SMA fiber. 3 models of spectrometers: LR: Low resolutionSTD: Standard resolutionHR: High resolutionOther on requests |
|---|---|
| Grating | HORIBA Aberration corrected Concave grating |
| Detector | BT CCD Maker: Hamamatsu Photonics |
| Electronics | BT CCD Electronics Maker: HORIBA, Ltd. Model: JY70 16bit acquisition electronic Exposure time: 1 ms ～ 10 sec The following ports are installed 1. LAN Ethernet 100Mbps RJ45 (TCP/IP) 2. IOR 70 Remote Db25 PIO-RS 3. DC Power supply: 9 to 24V, Standard 24V |
| Spectrometer LR | Model: EV2.0 LR (Low Resolution) Wavelengths range 300nm～ 900 nmFocal length: 20mmResolution: 6.5 nmSize (mm): 55,1 W X 133.5 X 139.6 HWeight (kg): 0.5 kg without cover (cover: + 0,15kg) |
| Spectrometer STD | Model: EV2.0 STD (Standard Resolution) Wavelengths range 200nm～ 1050 nmFocal length: 75mmResolution 2.5 nmSize (mm): 110.3 W X 133.5 X 139.6 HWeight (kg): 1 kg without cover (cover: + 0,15kg) |
| Spectrometer HR | Model: EV2.0 HR (High Resolution) Wavelengths range 300nm～ 800 nmFocal length: 75mm, Czerny-TurnerResolution: down to 1.0 nmSize (mm): 110.3 W X 133.5 X 139.6 HWeight (kg): 1.1 kg without cover (cover: + 0,15kg) |
| Remote | EV 2.0 may be connected to any host through digital Link with RJ 45 connector: TCP/IP. EV 2.0 spectrometer contains an interface board to provide galvanic isolation between the host controller hardware of the HOST / Tool from the spectrometer main electronics. Label onDescriptionPlug typeRemotePIO, RS, analog 0-5VFemale DB25 This permits to communicate by logic wiring, fast, deterministic with full optocouplers and power spikes isolation, frequently found in industrial fab environment |
| Label on | Description / Plug type |
| Remote | PIO, RS, analog 0-5V / Female DB25 |
| Certification | CE |
| Integration | 3U integration or stand alone with HORIBA Blue cover |
| DC Power Supply | 24V |
| SSD | 256 Go, 2,5” SATAIII |
| Design | Aluminum Frame, fanless design Anti-vibration and shock resistant |
| Connection | RS-232/422/485 RS-232 USB 3.0 on Standard 2x RJ45 Gb VGA, HDMI … |
| CPU | 64bits, Intel® Pentium® N4200, 2.5 GHz |
| RAM | 4Go DDR3 |
| Controller Dimensions | 197 (W) x 110 (D) x 55 (H) mm |
| Controller Mass | 2 kg |
| CPU | 64bits, Intel® Core™ i7-7700T 2,9 GHz |
| RAM | 8Go DDR4 2133MHz |
| Controller Dimensions | 264 (W) x 96.4 (D) x 186.2 (H) mm |
| Controller Mass | 4.5 kg |
| Accessories for Optical Emission Spectroscopy (Chamber side window) | ADAPTATION 1: DIN75 Flange AdaptorADAPTATION 2: UV, SMA fiber, 2m defaultADAPTATION 3: KF40 Optical condenser |
| Accessories for Interferometry (Chamber top window) | ADAPTATION 1: KF25 Tilt optical condenserADAPTATION 2: UV, Y SMA fiber, 2m defaultADAPTATION 3: Flash Lamp |
| Accessories for Spectrometer and PC | Direct connection on tool 24 VDC <1A, 20W for spectrometer<4A, 80W for PCExternal power supply AC 100-240V->24VDC, 5AHDMI Screen, Mouse, keyboard |
| Software | 3 choices of software EV 2.0 PC: Sigma_P, RD 2.0 for Engineering & ProductionEV 2.0 SMART: autonomous for Mass ProductionEV 2.0 API: SDK for integrators |
| Various Configurations | OES or InterferometryEV 2.0 for Single chamber integrationEV 2000/2006 for cluster tool integration up to 6 chambersEV 2.0 + LEM camera for dual-sensor monitoring on one chamber |
| Operating Temp/humidity | Temp：18℃～50℃ Humidity：0～70％RH （No dew condensation） |
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