Name: LEM Series
Brand: HORIBA
SKU: https://www.horiba.com/chn/products/detail/action/show/Product/lem-series-3254
Availability: InStock

Question 1

LEM Series的品牌和型号是什么？

Accepted Answer

当前页面显示，产品名称为LEM Series，型号为LEM Series，品牌为HORIBA。

Question 2

LEM Series属于哪个产品分类？

Accepted Answer

当前页面分类信息显示，LEM Series归入未在当前页面列出。如同一产品存在多个配置，应以页面列出的型号和规格字段进行区分。

Question 3

LEM Series当前页面有哪些用途说明？

Accepted Answer

当前页面对LEM Series的用途或产品说明为：实时干涉工艺监测仪可在蚀刻/沉积制程中对薄膜厚度和沟槽深度进行高精度检测。 规格参数 System outline LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and op

Question 4

LEM Series有哪些已公开规格参数？

Accepted Answer

当前页面已公开的LEM Series规格参数包括：品牌：HORIBA；型号/名称：LEM Series；System outline：LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imagin...；Light source：Laser diode；Light source wavelengths：670 nm, 905 nm, 980 nm；Magnification：50x (G50) or 120x (G120)。

Question 5

LEM Series选型时应优先核对哪些页面信息？

Accepted Answer

选型LEM Series时，应优先核对当前页面已经公开的产品名称、型号、品牌、分类和规格字段。当前可参考的信息为：型号 LEM Series；品牌 HORIBA；分类 未在当前页面列出；品牌：HORIBA；型号/名称：LEM Series；System outline：LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imagin...；Light source：Laser diode；Light source wavelengths：670 nm, 905 nm, 980 nm；Magnification：50x (G50) or 120x (G120)

Question 6

LEM Series是否有详细正文介绍？

Accepted Answer

当前页面已收录LEM Series的正文资料，摘要为：产品说明 实时干涉工艺监测仪可在蚀刻/沉积制程中对薄膜厚度和沟槽深度进行高精度检测。 规格参数 System outline LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imaging camera, allowin...

Question 7

LEM Series是否可以用于参数对比？

Accepted Answer

LEM Series可以基于当前页面规格字段进行初步参数对比。已公开字段包括：品牌：HORIBA；型号/名称：LEM Series；System outline：LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imagin...；Light source：Laser diode。

Question 8

LEM Series采购沟通时应提供哪些已知信息？

Accepted Answer

围绕LEM Series沟通采购需求时，可直接提供当前页面已知信息：产品名称 LEM Series，型号 LEM Series，品牌 HORIBA，分类 未在当前页面列出，关键规格 品牌：HORIBA；型号/名称：LEM Series；System outline：LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imagin...。

Question 9

LEM Series适合用于初步选型和询价沟通吗？

Accepted Answer

可以。当前页面整理了LEM Series的产品说明、图片和已公开规格，适合用于初步选型、型号核对和采购沟通；具体配置与报价建议提交需求后确认。

Question 10

询价LEM Series时建议提供哪些信息？

Accepted Answer

询价LEM Series时，建议提供使用场景、样品类型、目标参数、数量、交付地区以及是否需要安装和售后支持，便于确认型号配置和报价。

System outline	LEM camera consists of a compact interference measurement section that includes the laser source, light receiver, and optical components, as well as the illumination and CCD imaging camera, allowing monitoring of any area of the wafer surface using microscopic images.
Light source	Laser diode
Light source wavelengths	670 nm, 905 nm, 980 nm
Magnification	50x (G50) or 120x (G120)
Spot diameter	20 μm to 100 μm, depending on camera to wafer distance
Detector	Pin-photo diode
Camera Dimensions	65 (W) × 160 (H) × 100 (D) mm 2.6 (W) × 6.3 (H) × 3.9 (D) in (camera only, excluding stage)
Camera mass	1.2 kg, 2.6 lb
Remote	LEM-CT only may be connected to any host through digital Link with RJ 45 connector: TCP/IP. An optional SEQ70 box contains an interface board to provide galvanic isolation between the host controller hardware of the HOST / Tool from the box main electronics Label onDescriptionPlug typeRemotePIO, RS, analog 0-5VFemale DB25 This permits to communicate by logic wiring, fast, deterministic with full optocouplers and power spikes isolation, frequently found in industrial fab environment
Label on	Description / Plug type
Remote	PIO, RS, analog 0-5V / Female DB25
LEM SIGNAL BOX	LEM-CT only is provided with a LEM Signal BOX connected in USB on the PC to collect: Frame grabberLEM signal
Certification	CE
DC Power Supply	24V
SSD	256 Go, 2,5” SATAIII
Design	Aluminum Frame, fanless design Anti-vibration and shock resistant
Connection	RS-232/422/485 RS-232 USB 3.0 on Standard 2x RJ45 Gb VGA, HDMI …
CPU	64bits, Intel® Pentium® N4200, 2.5 GHz
RAM	4Go DDR3
Controller Dimensions	197 (W) x 110 (D) x 55 (H) mm
Controller Mass	2 kg
CPU	64bits, Intel® Core™ i7-7700T 2,9 GHz
RAM	8Go DDR4 2133MHz
Controller Dimensions	264 (W) x 96.4 (D) x 186.2 (H) mm
Controller Mass	4.5 kg
Manual XY stage Travel range	±8.0mm
Manual XY Stage dimensions	120 (W) × 120 (H) × 87 (D) mm 4.7 (W) x 4.7 (H) x 3.4 (D) in
Manual XY Stage Mass	1.3 kg, 2.8 lb
Motorized XY stage Travel range	±12.5mm
Motorized Stage dimensions	167 (W) × 117 (H) × 112 (D) mm 6.6 (W) × 4.6 (H) × 4.4 (D) in

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