LSC 系列
LSC 系列
HORIBA 销量人气的加热汽化系统为满足目前高科技工业的需求而开发。规格参数 Flow rate generated H2O 2SLM, TEOS 600 SCCM (Max.) Operating pressure Max. 1.33kPa Source tank volume 2.7L Heat regulation method PID con
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产品说明
HORIBA 销量人气的加热汽化系统为满足目前高科技工业的需求而开发。
规格参数
| Flow rate generated | H2O 2SLM, TEOS 600 SCCM (Max.) |
|---|---|
| Operating pressure | Max. 1.33kPa |
| Source tank volume | 2.7L |
| Heat regulation method | PID control by the heat regulator |
| Liquid surface detection method | Floating switch |
| Internal mass flow controller | SEC-8400 series |
| Air pressure valve | Bellows type |
| Materials in liquid connection and gas contact area | SUS316L, PFA |
| Operating Temperature | 20 to 35°C |
| External input | Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option) |
| External output | Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option) |
| Power source | AC 100 V, single phase 50/60 Hz, 1.5 kVA |
| Other | Auto-recharge system: Can be connected to LU series. |
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