PD10
PD10
规格参数。Model Dimensions (W) x (D) x (H) / 1,000 x 1,850 x 1,600 mm Weight Approx. 950kg Inspection Particle Size Pattern / 0.5 μm / 0.35 μm (0.1 μm: Blank Mask)*¹ Glass 5.0 μm
广西科米瑞实验仪器设备有限公司生产销售 HORIBA PD10，可提供产品参数、报价和售后服务咨询，价格面议。
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产品说明
PD10
规格参数
| Model | PD10 |
|---|---|
| Dimensions | (W) x (D) x (H) / 1,000 x 1,850 x 1,600 mm |
| Weight | Approx. 950kg |
| Inspection Particle Size | Pattern / 0.5 μm / 0.35 μm (0.1 μm: Blank Mask)*¹ |
| Glass | 5.0 μm (0.5 μm -: High Sensitivity Option)*¹ |
| Pellicle | 10.0 μm (0.5 μm -: High Sensitivity Option)*¹ |
| Light Source | 633 nm He-Ne laser or 488 nm Solid-state laser |
| Reticle Size | 5 inch - 9 inch |
| Case openers | SMIF POD, Compatible with various cases |
| Throughput | Approx. 12 min (From inspection start to test result display for 2 surface (6 inch) inspection) |
| Panel Surface Treatment | Stainless Steel |
| Installation Environment | Cleanliness / Class6 ISO standards or better |
| Temperature | 23 +/- 1°C |
| Utilities | Power / AC200-240 V, 2 kVA 50/60Hz, Single Phase |
| Vacuum Source | Pressure -80 kPA or less |
| Compressed Air | 0.6 MPa - 0.7 MPa |
| New Function / Option | Reticle Edge Handling / Yes |
| Auto Capture / Auto Sizing | Yes |
| Data Browser Function | Yes |
| False Detection Reduction Function | Yes |
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