PLIMA-LED
PLIMA-LED
规格参数。General Scan method / Spiral scan with 1800 RPM rotation and linear motion Wafer 4＂, 6＂ Stage XY-axis Linear stage, Z axis stage R stage with 1800RPM (Max) Measurement
广西科米瑞实验仪器设备有限公司生产销售 HORIBA PLIMA-LED，可提供产品参数、报价和售后服务咨询，价格面议。
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产品说明
PLIMA-LED
规格参数
| General | Scan method / Spiral scan with 1800 RPM rotation and linear motion |
|---|---|
| Wafer | 4＂, 6＂ |
| Stage | XY-axis Linear stage, Z axis stage R stage with 1800RPM (Max) |
| Measurement | Objective Lens / 5X, 10X, 20X, 50X Laser excitation without objective lens (Option) |
| Image Camera | Resolution: 2048 x 2048 (4M pixel) Pixel size: 5.5 um x 5.5 um |
| Optical Fiber | 400 um bundle core |
| PMT | Port 1 (PMT 1): PL Inspection with bandpass filter Port 2 (PMT 2): Reflection (Scattering) |
| Spectrometer | Groove Density: 300 lines/ mm Spectral range (nm): 210 – 2100 Pixel (ea): 2048 x 64 Dispersion: 0.44 nm / pixel |
| Excitation Source | 50 mW 375 nm Laser (for Blue, Green LED) 50 mW 532 nm Laser (for Red LED) |
| Measurement speed | 4inch / 6inch |
| PMT Mapping (2 channel at same time, 5um step) | 8pcs / 1H / 6pcs / 1H |
| PMT Mapping & Spectrum mapping (Optional measurement) | 7 pcs / 1H (PMT: 5um / Spectrum: 2mm ) / 7 pcs / 1H (PMT: 5um / Spectrum: 4mm ) |
| Micro Spectrometer mapping | 3,600 points / hour Step: Min. 2um |
| Dimension (mm) | 2000 (w) x 1400 (d) x 2000 (h) |
| Operating Environment | Place / Clean Room (class ~ 10000) |
| Temperature | 15 ~ 35° C |
| Humidity | <85% RH with no condensation |
| Utility | Dimensions / 1500 mm x 2000 mm x 2300 mm, incl. HEPA filter |
| Weight | 1760 Kg |
| Input Voltage | 220V±10% 50/60Hz single phase |
| Full load current | 47A |
| Vacuum1 | 40L/min, -80KPa Pipe size: Outer diameter 6mm |
| Vacuum2 | 120L/min, -40KPa Pipe size: Outer diameter 6mm |
| Air | 90L/min, 0.5MPa Pipe size: Outer diameter 6mm |
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