RU-1000
RU-1000
The plasma emission controller RU-100 offers faster deposition by controlling the transition region, optimising distribution in a large-area, plasma stabilization & mixture opti...
广西科米瑞实验仪器设备有限公司生产销售 HORIBA RU-1000，可提供产品参数、报价和售后服务咨询，价格面议。
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产品说明
The plasma emission controller RU-100 offers faster deposition by controlling the transition region, optimising distribution in a large-area, plasma stabilization & mixture optimization of compounds for reactive sputtering.
规格参数
| 1. | 检测特定波长的等离子体发射强度 设计用于捕获等离子体发射的 PMT 装置可以直接安装在真空室中。等离子体发射可以通过光纤从真空室引导到 PMT 装置。可根据情况选择任一选配。 |
|---|---|
| 2. | 执行质量流量控制器的反馈控制 一个控制器可以控制多达四个 PMT 装置和四个质量流量控制器。可捕获来自等离子体电源的信号，而非来自 PMT 装置的信号。 |
| 3. | 支持各种阴极条件 我们编写的原始算法实现了与 Al2O3 的出色反应溅射，而能实现这一点非常困难。该软件还验证了旋转阴极的稳定性能。 |
| 4. | 对等离子体发射的变化高度敏感 高速响应质量流量控制器对于在监测等离子体发射变化的同时控制反应气体至关重要。HORIBA STEC 在半导体制造系统的质量流量控制器生产中占有一定的市场份额*，公司致力于为每个系统提供优质的质量流量控制器。 |
| Input signal | Ethernet(10BASE-T,100BASE-TX) 1CH The monitor signal of PMT, or the monitor signal of the power supply for sputtering (0-10Vdc/0-100%) 4CH MFC output signal (0-5Vdc/0-100%) 4CH |
| Output signal | PMT Gain setting signal (0-5Vdc/0-100%) 4CH MFC setting signal (0-5Vdc/0-100%) 4CH |
| Power supply | AC100～240V±10% 50/60Hz 100VA |
| Weight | Approx. 5.3kg |
| Input signal | Plasma emission, PMT gain(0-5V) |
| Output signal | PMT output signal (0-10Vdc) |
| Power supply | DC15V 60mA |
| Other | A narrowband filter can be attached with the inside of PMT. |
| Weight | Approx. 720g |
| A category temperature range and the humidity range. | 10-300℃, 10-80%RH |
| Material | Collimator: SUS304 Window lens: synthetic fused silica glass |
| Weight | Approx. 150g |
| The diameter of a collimator tip | φ12 |
| A category temperature range and the humidity range. | 10-200℃, 10-80%RH |
| Weight | Normal Type: Approx. 100g Direct connection type: Approx. 160g (Flange type: In the case of KF25) |
| Name | Type |
| Narrowband filter Set | RU-1000B The User specifies center wave length. |
| Cable for SIG (1M) | RU-1000H-02-01 |
| Cable for SIG (2M) | RU-1000H-02-02 |
| Cable for SIG (3M) | RU-1000H-02-03 |
| Cable for SIG (5M) | RU-1000H-02-05 |
| Cable for SIG (10M) | RU-1000H-02-10 |
| Name | Type |
| Cable for PMT(1M) | RU-1000H-01-01 |
| Cable for PMT(2M) | RU-1000H-01-02 |
| Cable for PMT(3M) | RU-1000H-01-03 |
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