Mad City Labs Nano-Align3 Series

产品说明: The Nano-Align3 is a three axis (Z, θ X , θ Y ) piezo nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ ® technology provide picometer and nanoradian precision under closed loop control.

产品特点: Low profile piezo nanopositioner: 0.8" Three axis motion (Z θ X θ Y ) Large center aperture: 2.6" x 2.6" Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θ X θ Y ) Closed loop control

典型应用: Z-axis plus tip/tilt alignment Nanolithography Microscopy MEMS

技术规格: Ranges of motion (Nano-Align3-100) Z axis 100 μm θ X and θ Y 2 mradian Ranges of motion (Nano-Align3-200) Z axis 200 μm θ X and θ Y 4 mradian Resolution (Nano-Align3-100) 0.2nm/ 4 nradian Resolution (Nano-Align3-200) 0.4nm/ 8 nradian Resonant Frequency (Nano-Align3-100) 600 Hz ±20% Resonant Frequency (Nano-Align3-200) 450 Hz ±20% Stiffness 1.0 N/μm Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Aluminum, Titanium, or Invar Controller Nano-Drive ® /Nano-Dri