Mad City Labs Nano-Man5

产品说明: The Nano-Man5 is a five axis (X, Y, Z, θX , θY) piezo nanopositioning system with closed loop feedback control for absolutel position measurement. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θ X θ Y ). Internal position sensors utilizing proprietary PicoQ ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.

产品特点: Compact piezo nanopositioner Five axis motion (XYZ θ X θ Y ) 50 μm x 50 μm x 25 μm x 1mrad x 1mrad ranges of motion Closed loop control

典型应用: Alignment MEMS Nanolithography SEM

技术规格: Range of motion (X) 50 μm Range of motion (Y) 50 μm Range of motion (Z) 25 μm Range of motion (θ X ) 1 mradian Range of motion (θ Y ) 1 mradian Resolution (X) 0.1 nm Resolution (Y) 0.1 nm Resolution (Z) 0.05 nm Resolution (θ X ) 2 nradian Resolution (θ Y ) 2 nradian Resonant Frequency (X) 285 Hz ±20% Resonant Frequency (Y) 235 Hz ±20% Resonan