GIGAbatch 360/380M
GIGAbatch 360/380M
Plasma Surface Treatment。Designed for production applications。Very low cost of ownership
广西科米瑞实验仪器设备有限公司生产销售 PVA TePla GIGAbatch 360/380M，可提供产品参数、报价和售后服务咨询，价格面议。
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Plasma Surface Treatment
Plasma Frontend
Compact design
Designed for production applications
Very low cost of ownership
Cleanroom-qualified glass front
Versatile substrate handling (2" to 8")
High throughput (up to 75 wafers per run)
Custom wafer support arms included
Motorized door for wafer loading
No contact with plasma chamber during loading
Also available on request
An active control device for the process pressure (DSC)
A Faraday cage
Additional gas ducts
Loading devices for different-sized substrates or wafers
A ceramic process chamber
Special seals for operation with process gas containing fluorine
Interested in GIGAbatch 360 / 380M
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