Raith VOYAGER - High performance for shortest time to result

：Introduction

：Key features

：Highly ergonomic human-machine interface

：50 kV thermal field emission column technology

：Fully automated write field calibration

：Automatic focus and stigmator setup

：Automatic switch between high-resolution and high-throughput writing modes

：Flexible directional shape-filling modes

：Stitching-error-free continuous writing modes

：Unique formula-based patterning technology

：System stability and ease of use even in less ideal laboratory environments

：High system stability

：Shortest time to result

：Application specific solutions

：Motion

：Perfect

：Shapes

：Positioning

：Software

：Digital RAITH is the infrastructure for any nanolithography applications

：GDSII CAD layout editor

：Mix and Match capabilities

：Full exposure job automation & customization

：Dedicated imaging and metrology functionality