scia Finish 1500

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Ion Beam Etching

Ion Beam Trimming

Ion Beam Sputtering

scia Cluster 200

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Polishing Error Correction for Lenses and Mirrors

The scia Finish 1500 is used for surface form error correction of high-precision optical elements. The system is suitable for high volume production with 24/7 operation due to fast pumping times and high removal rates of the ion beam source.

Features & Benefits

Long term stable process for repeatable quality of optical components

Excellent precision on large areas

High removal rates for high throughput

Easy loading of large substrates due to sliding doors

Designed for high volume production with short pump down times

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Applications

Results (left-pre, right-post) for ion beam figuring of a mirror over 1500 mm, simulated. Standard deviation: pre: 256 nm, post: 1.9 nm; Range: pre: 1550 nm, post: 85 nm

Final surface form error correction of lenses and mirrors Telescope mirrors (Zerodur®, SiC, LTEM) Conventional optics (quartz and other glasses) Ion beam figuring of X-ray optics (Si)

Telescope mirrors (Zerodur®, SiC, LTEM)

Conventional optics (quartz and other glasses)

Ion beam figuring of X-ray optics (Si)

Application Note

Form Error Correction for X-ray mirrors

Principle

Focused broad ion beam scans across substrate surface in vertical setup for low contamination

Dwell time control to remove different amounts of material

Ion Beam Figuring (IBF) is a polishing error correction by a scanning ion beam and dwell time control.