scia Opto 300
scia Opto 300
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Precision in Optical Coating
The scia Opto 300 is used for uniform coating of precision optics. With up to 6 targets for flexible multilayer deposition, even a mixing of target materials is possible. Two loading positions allow continuous and fully automatic processing of the substrates. Optical in-situ monitoring with integrated test glass changer ensures highest precision and optimized uniformity of coating.
Features & Benefits
Variable substrate sizes up to 300 mm dia.
Automatic loading with two loading positions for continuous processing
Up to 6 target materials on a rotatable trum, each target up to 300 mm x 300 mm, with optimized geometry for mixed layers or smooth transition between layers
Excellent process uniformity by substrate rotation with up to 60 rpm
In-situ optical thickness monitor (OTM) and test glass changer
Optimized geometry for coating with low stress
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Applications
Application Example: Anti-reflex coating of a multilayer stack consisting of Ta2O5
and SiO2 on TGG, designed to be transparent for typical laser lines of 633 nm
and 1064 nm | picture left: structure of the layer stack | picture right: Transmission spectra measured with transmission mode of ellipsometer. The target values of the reflectivity could be reached.
Dielectric mirrors (e.g. rugate filters)
Optical coatings for high- and anti-reflective layers, bandpass and notch filters
High laser damage threshold coatings
Deposition of refractive index gradient layers
In-situ preprocessing of substrates (etching, cleaning, smoothing)
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