Fiji – Plasma Enhanced ALD for R&D
Fiji
Advanced Capabilities for Advanced Research。：Our Fiji® series is a modular, high-vacuum thermal ALD system that accommodates a wide range of deposition modes using a flexible arc
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：Advanced Capabilities for Advanced Research
：Our Fiji® series is a modular, high-vacuum thermal ALD system that accommodates a wide range of deposition modes using a flexible architecture and multiple configurations of precursors and plasma gases. The Fiji G2 is a next-generation ALD system capable of performing thermal and plasma-enhanced deposition.
：We have applied advanced computational fluid dynamics analyses to optimize the Fiji® reactor, heater, and trap geometry. The system’s intuitive interface makes it easy to monitor and change recipes and processes as needed.
：Fiji’s advanced features include:
：Proprietary Chamber Turbo Pumping System
：Improved Plasma Design
：Ergonomic Operator Interface
：In-Situ Ellipsometry
：In-Situ Quartz Crystal Microbalance
：The Fiji® is available with up to six precursor lines that can accommodate solid, liquid or gas precursors, and six plasma gas lines, offering significant experimental flexibility in a compact and affordable footprint.
：Download our latest white paper: Researchers at Technion-Israel Institute of Technology Publish Near-Record Low Oxygen Incorporation and Near Bulk Quality Resistivities in ALD Nitride Films Using Veeco’s Fiji® Plasma ALD System
：Technical specifications
：SEMI S2/S8 (optional)
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