GEN20
Ultra-Flexible Tool with a Design Configurable for III-V and Emerging Materials
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:Ideal for materials research and pre-production environments
:Vertical source to substrate orientation with 12 MBE source ports and the option to add e-beam capabilities
:Manual or automated wafer transfer options
:Configurable cryopanel, manipulator, shutters and in-situ monitoring equipment
:Modular design allows up to two growth modules
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