中文English
科米瑞
首页联系我们
  1. 首页
  2. 产品中心
  3. 产品详情
科米瑞

© Copyright 科米瑞 2026

产品中心全量目录应用领域知识中心常见问题联系我们隐私政策桂ICP备2020008265号-5
广西科米瑞实验仪器设备有限公司13422079856122816084@qq.com
分析检测仪器生命科学仪器显微成像与光学样品前处理温控加热与制冷真空泵阀与流体科米瑞仪器应用领域实验室仪器选型

WaferEtch Wet Processing Platform

WaferEtch

WaferChek Endpoint – Optical endpoint enables accurate identification of etch endpoint to minimize undercut, improve throughput, and lower chemistry cost.

品牌: Veeco价格: 面议服务区域: 全国

广西科米瑞实验仪器设备有限公司生产销售 Veeco WaferEtch,可提供产品参数、报价和售后服务咨询,价格面议。

立即询价查看更多详情咨询该型号
← 返回产品列表
VeecoWaferEtch产品资料

:WaferChek Endpoint – Optical endpoint enables accurate identification of etch endpoint to minimize undercut, improve throughput, and lower chemistry cost.

:Hyperbolic arm scan control- User can tailor the dispense arm pattern to optimize etch uniformity

:Adaptive Spiking- Chemical concentration control to ensure stable etch rate batch to batch and within batch.

:High Volume Platform- 3300 series

:1 – 10 chamber modular system

:Low foot print- stacked chambers

:On board chemical supply

:Multiple wafer sizes- 50 to 300mm

:Multiple substrate types – Si, LiTaO3, Sapphire, Glass

:Manual load platform for R&D- ML

:Single chamber- manual load

:WaferEtch 3300 Series Platform Manual Load Platform

:As I/O counts increase and performance requirements become more stringent, the RDL line/space dimensions continue to shrink. To enable these smaller dimensions, superior process control is required. The WaferEtch platform meets these process requirements with WaferChek endpoint and hyperbolic dispense arm motion.

:Compound Semiconductor Etch and Silicon Thinning

相关产品

WaferStorm

WaferStorm Wet Processing Platform

WaferStorm

提交需求

请填写必填信息,我们将在工作日尽快回复。