
LABORATORY INSTRUMENTS
威尔 WALE CER 系列 粗糙度轮廓复合机
WALE / 威尔
传感器切换方便,巧妙的机械结构设计,使得轮廓传感器与粗糙度传感器在互换时更加省时省力。
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MEASUREMENT APPROACH
Product overview & applications
Technical specifications
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| CER系列粗糙度轮廓复合机 技术参数 | ||
|---|---|---|
| 测量范围 | X轴 | 120-220mm |
| X轴分辨率 | 0.1μm | |
| Z轴 | 320-620mm | |
| 轮廓传感器 | Z1轴量程 | 30-60mm |
| Z1分辨率 | 0.02μm | |
| 轮廓精度 | Z1线性精度 | <±(0.8+|0.05H|)μm |
| 圆弧 | ±(2+R/8)μm | |
| 圆弧Pt | / | |
| 角度 | ±2' | |
| 直线度 | 0.5μm/100mm (截止波长2.5) | |
| 粗糙度传感器 | 量程 | ±420μm |
| 分辨率 | 65536:1 | |
| 粗糙度精度 | 指示精度 | ≤±(10nm+3.5%) |
| 残值噪声 | ≤0.010μm | |
| 重复性 | 1δ≤2nm | |
| 截止波长 | 0.025、0.08、0.25、0.8、2.5、8mm | |
| 评定长度 | λC×2、3、4、5、6、7 | |
APPLICATION CONSULTATION
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