测量方法
产品概述与应用
A400 DUO 是 ASM 面向 200 mm 及更小晶圆的批量立式炉，应用于功率、模拟、射频和 MEMS 器件市场。
规格参数
- 型号：A400 DUO
- 产品名称：A400™ DUO
- A400 DUO is a batch vertical furnace for 200 mm and smaller wafers, and focuses on applications in the markets for power, analog, RF, and MEMS devices. The A400 DUO furnace tool is capable of running low pressure CVD (LPCVD), as well as dif
技术参数
| 型号 | A400 DUO |
|---|---|
| 产品名称 | A400™ DUO |
| 产品说明 | A400 DUO is a batch vertical furnace for 200 mm and smaller wafers, and focuses on applications in the markets for power, analog, RF, and MEMS devices. The A400 DUO furnace tool is capable of running low pressure CVD (LPCVD), as well as dif |
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