测量方法
产品概述与应用
Epsilon 2000 是 ASM 官网列出的单片外延工具，支持 150 mm 和 200 mm 晶圆的多种外延应用。
规格参数
- 型号：Epsilon 2000
- 产品名称：Epsilon® 2000
- Our Epsilon 2000 single-wafer epitaxy tool offers a wide variety of epitaxy applications for 150 mm and 200 mm wafers. They range from high-temperature silicon for wafer preparation to low-temperature selective or non-selective silicon
技术参数
| 型号 | Epsilon 2000 |
|---|---|
| 产品名称 | Epsilon® 2000 |
| 产品说明 | Our Epsilon 2000 single-wafer epitaxy tool offers a wide variety of epitaxy applications for 150 mm and 200 mm wafers. They range from high-temperature silicon for wafer preparation to low-temperature selective or non-selective silicon |
应用咨询
联系科米瑞 咨询仪器选型与报价
提供产品名称、型号、数量和使用要求，我们将协助确认参数与配置。