
测量方法
产品概述与应用
Intrepid ES 是 ASM 的先进外延沉积工具,面向先进晶体管和存储器的关键 300 mm 应用;Intrepid ESA 面向硅基模拟、功率器件和晶圆制造应用。
规格参数
- 型号:Intrepid ES / ESA
- 产品名称:Intrepid® ES™ Intrepid® ESA™
- The Intrepid® ES™ is our most advanced epitaxy deposition tool. It is designed for the most critical 300 mm applications for advanced transistors and memories. Our Intrepid® ESA™ is targeted for silicon-based analog/power devices and wa
技术参数
| 型号 | Intrepid ES / ESA |
|---|---|
| 产品名称 | Intrepid® ES™ Intrepid® ESA™ |
| 产品说明 | The Intrepid® ES™ is our most advanced epitaxy deposition tool. It is designed for the most critical 300 mm applications for advanced transistors and memories. Our Intrepid® ESA™ is targeted for silicon-based analog/power devices and wa |
应用咨询
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