测量方法
产品概述与应用
产品说明：Dynox with integrated TEOS solution is described for oxidizing pyrophoric gas compounds in exhaust gases from semiconductor processes.
主要特点：TEOS will be fully oxidized, lower explosive limit, minimum dilution, eco-friendly without water or extra gas usage.
技术信息：Developed, engineered & produced in Germany; high safety level; reacts highly flammable and pyrophoric gases.
技术参数
| 型号 | Dynox feat. TEOS |
|---|---|
| 产品类型 | Gas Abatement Solutions |
| 技术信息 | TEOS will be fully oxidized; lower explosive limit; minimum dilution |
| 生产信息 | Developed, engineered & produced in Germany |
应用咨询
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