测量方法
产品概述与应用
产品说明
CS-600F 提供适合生产的更高级功能，如在各种应用中对高温化学药液进行在线测量的能力，减少停机时间的稳定运行，以及提高空间生产率的紧凑尺寸，以满足先进半导体湿法制程所需的准确化学药液浓度管理。
规格参数
| Model | CS-600F |
|---|---|
| Measurement principle | Absorption spectroscopic method |
| Calculation principle | Temperature compensation type multivariate analysis |
| Measurement target | NH3/H2O2/H2O (reperesentative specification) * Please contact HORIBA regarding other chemicals. |
| Measurement range | NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、H2O：93.3～100.0mass% |
| Repeatability | NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass% Chemical temperature: Within ±1℃/1 hour |
| Sample solution temperature | 20〜80℃ |
| Measurement cycle | Approx. 3 seconds |
| LCD display | (1) Measured value (%) (2) Concentration alarm (HH/H/L/LL) (3) Error code (EXXX) (4) Chemical temperature (°C) (5) Serial/parallel communication status (P/S) (6) The times of background correction failure (CXXX) |
| Key input | (1) Concentration alarm setting (HH/H/L/LL) (2) Concentration value shift (3) Background correction (4) Hot water correction (5) Temperature dependent concentration shift |
| Parallel input | Input voltage of 12 V to 30 V DC by insulating with photo coupler (1) Parallel concentration alarm output (On/Off) (2) Switching chemical solution for measurement (including background correction) (3) Hot water correction |
| Parallel output | Transistor output (NPN open collector) by insulating with photo coupler Maximum current when powered ON: 5 mA DC (no internal protective resistance) Maximum voltage when powered OFF: 30 V DC (1) Concentration alarm (ON at HH/H/L/LL alarm) (2) Monitor error (OFF at error) (3) Measuring (ON at measurement) (4) Chemical solution type for measurement (5) Echo to hot water correction input (6) Warning (ON at occurred) (7) Background correction status 8) Hot water correction status |
| Serial input | RS-232C (1) Request for readout of measurement data (2) Select chemical solution type to be measured (3) Hot water correction |
| Serial output | RS-232C (1) Measured data No. (2) Chemical solution type (3) Concentration value (4) Error code (5) Chemical temperature |
| Analog output | 4 mA to 20 mA In case of monitor error occurs, measurement is stopped or invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum. |
| Chemical solution temperature input | Terminal block inlet (terminal screw M3) Platinum resistance temperature sensor: Pt100 (Three-conductor type, Class A) *Temperature sensor is not included. |
| Air (for operation and purge) | Connection port: 4 mm O.D. quick joint, Pressure: 0.2 MPa ±0.02 Mpa |
| Power source | 100～230V AC（Single-Phase）、50/60Hz |
| Power consumption | Approx. 85 VA (transient electric current at the time of the start is excluded) |
| Weight | (Monitor) Approx. 3.6 kg (Lamp unit) Approx. 2.8 kg (Sample cell) Approx. 1.2 kg |
| Ambient temperature | (Monitor, Lamp unit) 20°C to 30°C (Sample cell, Optical fiber) 20°C to 35°C (Sudden temperature change should be avoided, within ±1°C/1 hour) |
| Ambient humidity | (Monitor, Lamp unit, Sample cell) 40% to 70% (Should be no dew condensation) |
| Slanting angle at installation | (Monitor, Lamp unit) within ±1° |
| Optical fiber | Length: 5 m, minimum bend radius: R 150 mm |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | CS-600F |
| Model | CS-600F |
| Measurement principle | Absorption spectroscopic method |
| Calculation principle | Temperature compensation type multivariate analysis |
| Measurement target | NH3/H2O2/H2O (reperesentative specification) * Please contact HORIBA regarding other chemicals. |
| Measurement range | NH3：0.00～1.20mass%、H2O2：0.00～5.50mass%、H2O：93.3～100.0mass% |
| Repeatability | NH3：±0.05mass%、H2O2：±10mass%、H2O：±1.0mass% Chemical temperature: Within ±1℃/1 hour |
| Sample solution temperature | 20〜80℃ |
| Measurement cycle | Approx. 3 seconds |
| LCD display | (1) Measured value (%) (2) Concentration alarm (HH/H/L/LL) (3) Error code (EXXX) (4) Chemical temperature (°C) (5) Serial/parallel communication status (P/S) (6) The times of background correction failure (CXXX) |
| Key input | (1) Concentration alarm setting (HH/H/L/LL) (2) Concentration value shift (3) Background correction (4) Hot water correction (5) Temperature dependent concentration shift |
| Parallel input | Input voltage of 12 V to 30 V DC by insulating with photo coupler (1) Parallel concentration alarm output (On/Off) (2) Switching chemical solution for measurement (including background correction) (3) Hot water correction |
| Parallel output | Transistor output (NPN open collector) by insulating with photo coupler Maximum current when powered ON: 5 mA DC (no internal protective resistance) Maximum voltage when powered OFF: 30 V DC (1) Concentration alarm (ON at HH/H/L/LL alarm) … |
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