测量方法
产品概述与应用
产品说明
CS-600F光纤型高温磷酸浓度计实现了更高级的功能，适合制造，以满足尖端半导体湿法工艺所需的化学药液浓度管理。
规格参数
| CS-700 High Precision, High Stability Chemical Concentration Monitor | CS-600F Fiber Optic Type Chemical Concentration Monitor / HF HD-960L Dissolved Oxygen Monitor in Low Concentration |
|---|---|
| Product name | CHEMICAL SOLUTION MONITOR |
| Model | CS-620F |
| Measurement principle | Absorption spectroscopic method |
| Calculation principle | Temperature compensation type multivariate analysis |
| Sample | H3PO4/H2O |
| Measurable range Repeatability | Component / Measurable range (mass%) / Repeatability (mass%) / Analog output range(mass%) |
| 1st solution | H3PO4 / 85.00-92.00 / +/-0.10 / 85.00-100.00 |
| H2O | 8.0-15.0 / +/-0.3 / 0.0-15.0 |
| Conditions of Measurement | 1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times |
| Connection fitting size | 1 inch or 3/4 inch |
| Sample condition | Sample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time: 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min |
| Air(for operation and purge) | Connection port: 4 mm O.D. quick joint Pressure: 0.2 MPa ± 0.02 MPa |
| Power source | 100 to 230 V AC (Single-Phase), 50/60 Hz |
| Power consumption | Approx.85 VA (Transient electric current at the time of the start is excluded) |
| Communication | Parallel I/O, RS-232C, Analog output |
| Dimension | (Monitor) 200 (W) × 308 (D) × 78 (H) mm (Lamp unit) 200 (W) × 262 (D) × 100 (H) mm (Sample cell) 240 (W) × 209 (D) × 205 (H) mm |
| Weight | (Monitor) Approx.3.6 kg (Lamp unit) Approx.2.8 kg (Sample cell) Approx.3.0 kg |
| Ambient temperature | (Monitor, Lamp unit) 20 to 30°C (Optical fiber, Sample cell) 20 to 100°C * Sudden temperature change should be avoided, within +/- 1°C/1hour |
| Ambient humidity | (Monitor, Lamp unit) 40 to 70% (Should be no dew condensation) |
| Slanting angle of installation | (Monitor, Lamp unit) Within +/-1 degree (Sample cell) Please install so that air bubbles do not stay up. |
| Optical fiber | Length: 5 m, Bend radius: R150 mm |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | CS-620F |
| CS-700 High Precision, High Stability Chemical Concentration Monitor | CS-600F Fiber Optic Type Chemical Concentration Monitor / HF HD-960L Dissolved Oxygen Monitor in Low Concentration |
| Product name | CHEMICAL SOLUTION MONITOR |
| Model | CS-620F |
| Measurement principle | Absorption spectroscopic method |
| Calculation principle | Temperature compensation type multivariate analysis |
| Sample | H3PO4/H2O |
| Measurable range Repeatability | Component / Measurable range (mass%) / Repeatability (mass%) / Analog output range(mass%) |
| 1st solution | H3PO4 / 85.00-92.00 / +/-0.10 / 85.00-100.00 |
| H2O | 8.0-15.0 / +/-0.3 / 0.0-15.0 |
| Conditions of Measurement | 1) Measurement interval: Approx. 3 sec. (minimum) 2) Moving average: 16 times |
| Connection fitting size | 1 inch or 3/4 inch |
| Sample condition | Sample temperature: 140 to 170°C Atmospheric temperature, Chemical temperature fluctuation: within +/- 1°C (period of time : 1 hour) Input pressure: 0.2 MPa or less Pressure fluctuation: 0.02 MPa or less Flow rate: 1 to 30 L/min |
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