测量方法
产品概述与应用
产品说明
HORIBA CS-700 化学药液浓度计能够对先进半导体制程中使用的复杂化学药液的单个化学成分进行高性能测量。
规格参数
| Component | Measurable range / Repeatability |
|---|---|
| 1st solution | HNO3 / 30.0 - 34.0 / ±0.5 |
| HF | 2.00 - 4.00 / ±0.10 |
| H3PO4 | 35.0 - 39.0 / ±0.6 |
| H2SiF6 | 0.00 - 3.00 / ±0.50 |
| H2O | 25.0 - 33.0 / ±1.0 |
| item | CS-100 / CS-700 |
| Measurement principle | Absorption spectroscopic method / Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C / 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C / 20 to 30 Degree C |
| Components | Max. 4 components / Max. 8 components |
| Chemical range | Max. 4 ranges / Max. 6 ranges |
| Communication | Parallel I/O, Analog output, RS-232C / Parallel I/O, Analog output, RS-232C |
| Analog output (4-20 mA) | Max. 2 components / Max. 6 components |
| Dimension | 205(W) X 329(D) X 269(H)mm / 218(W) X 391(D) X 213(H)mm |
| Power source | DC 24V / DC 24V(Same connecter of CS-100) |
| Consumable parts | Halogen lamp / Halogen lamp (Same as CS-100 type) |
| Wavelength | UV/NIR / UV/NIR |
| Wetted material | PTFE, PFA, Sapphire or Quartz, / PTFE, PFA, Sapphire,Kalrez 4079 O-ring |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | CS-700 |
| Component | Measurable range / Repeatability |
| 1st solution | HNO3 / 30.0 - 34.0 / ±0.5 |
| HF | 2.00 - 4.00 / ±0.10 |
| H3PO4 | 35.0 - 39.0 / ±0.6 |
| H2SiF6 | 0.00 - 3.00 / ±0.50 |
| H2O | 25.0 - 33.0 / ±1.0 |
| item | CS-100 / CS-700 |
| Measurement principle | Absorption spectroscopic method / Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C / 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C / 20 to 30 Degree C |
| Components | Max. 4 components / Max. 8 components |
| Chemical range | Max. 4 ranges / Max. 6 ranges |
应用咨询
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