测量方法
产品概述与应用
产品说明
为达到半导体湿法制程中所需的严格化学药液浓度控制，HORIBA 通过设计紧凑设备，以及通过其原有传感器设计保持稳定测量和确保操作人员安全，实现更强大功能以满足需求。
规格参数
| Model name | Non-contact type chemical concentration monitor |
|---|---|
| Model | CS-900 |
| Measurement method | Absorption spectroscopy |
| Concentration calculation | Temperature compensated multivariate analysis |
| Measurement range/ Repeatability (mass%) | Model name / Component / Measurable range / Repeatability / Analog output range |
| CS-900-1P-1P25P5 | NH3 / 0.00%-1.20% / ±0.05% / 0.00-10.00 |
| H2O2 | 0.00%-5.50% / ±0.10% / 0.00-10.00 |
| H2O | 93.3%-100.0% / ±1.0% / - |
| CS-900-1P-P8P8 | NH3 / 0.20%-0.80% / ±0.03% / 0.00-1.00 |
| H2O2 | 0.20%-0.80% / ±0.03% / 0.00-1.00 |
| H2O | 98.4%-99.6% / ±0.3% / - |
| Conditions of measurement | 1) Measurement Frequency: every 3 seconds 2) Moving average: 16 times |
| Tube | PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube) |
| Sample condition*1 | Sample temperture: 20 to 80°C Sample temperture, Atmospheric temperture fluctuation: ±1 degree C (period of time: 1 hour) Sample pressure: Less than 0.2 MPa (G) Sample pressure fluctuation: Within 0.02 MPa |
| Power source | DC 24V |
| Power consumption | Apporox. 30W (Transient electric current at the time of start is excluded) |
| Weight | Display unit: Apporox. 0.9kg Sensor unit: Apporox. 2.9kg |
| Dimension (WxDxH) | Display unit: 96x135x96mm Sensor unit: 238x135x190mm |
| Slanting angle | Sensor unit: Vertical direction within ±3 degree Lateral direction 0 to 90 degree |
| Light source | 5years |
| communication | Parallel I/O, RS-232C, Analog output |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | CS-900 |
| Model name | Non-contact type chemical concentration monitor |
| Model | CS-900 |
| Measurement method | Absorption spectroscopy |
| Concentration calculation | Temperature compensated multivariate analysis |
| Measurement range/ Repeatability (mass%) | Model name / Component / Measurable range / Repeatability / Analog output range |
| CS-900-1P-1P25P5 | NH3 / 0.00%-1.20% / ±0.05% / 0.00-10.00 |
| H2O2 | 0.00%-5.50% / ±0.10% / 0.00-10.00 |
| H2O | 93.3%-100.0% / ±1.0% / - |
| CS-900-1P-P8P8 | NH3 / 0.20%-0.80% / ±0.03% / 0.00-1.00 |
| H2O2 | 0.20%-0.80% / ±0.03% / 0.00-1.00 |
| H2O | 98.4%-99.6% / ±0.3% / - |
| Conditions of measurement | 1) Measurement Frequency: every 3 seconds 2) Moving average : 16 times |
应用咨询
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