测量方法
产品概述与应用
产品说明
可准确测量 TMAH（四甲基氢氧化铵）的浓度。TMAH 是半导体制程中光刻胶显影液的主要成分。宽测量范围：0 - 10 %。
规格参数
| Model | HE-960H-TM |
|---|---|
| Measurement range | 0 - 10% |
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 series (flow-type carbon sensor) |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | HE-960H-TM |
| Model | HE-960H-TM |
| Measurement range | 0 - 10% |
| Ambient environment | Temperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation) |
| Power supply | 24 V DC ±10%, 10 W (max.) |
| Protective structure | Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type) |
| Mass | Approx. 550 g |
| Conforming standards | CE marking, FCC Part 15 |
| Compatible sensors | FES-510 series (flow-type carbon sensor) |
应用咨询
联系科米瑞 咨询仪器选型与报价
提供产品名称、型号、数量和使用要求，我们将协助确认参数与配置。