测量方法
产品概述与应用
产品说明
可准确测量 TMAH（四甲基氢氧化铵）的浓度。TMAH 是半导体制程中光刻胶显影液的主要成分。重复性：+/- 0.003% 内。
规格参数
| Model name | HE-960H-TM-S |
|---|---|
| Target of measurement | TMAH |
| Measurement range | Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm |
| Repeatability | Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
| Linearity | Within +/- 0.003wt% (Using equivalent input for conductivity) |
| Transmission output | Number of output: 4 |
| Contact output | Outputs: 5 points |
| Communication output | RS-485 |
| Power supply | 24V DC +/- 10% 10W |
| Compatible sensor | FES-510 Series |
| Wetted material of sensor | GC, PFA, Karletz® |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | HE-960H-TM-S |
| Model name | HE-960H-TM-S |
| Target of measurement | TMAH |
| Measurement range | Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm |
| Repeatability | Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
| Linearity | Within +/- 0.003wt% (Using equivalent input for conductivity) |
| Transmission output | Number of output: 4 |
| Contact output | Outputs: 5 points |
| Communication output | RS-485 |
| Power supply | 24V DC +/- 10% 10W |
| Compatible sensor | FES-510 Series |
| Wetted material of sensor | GC, PFA, Karletz® |
应用咨询
联系科米瑞 咨询仪器选型与报价
提供产品名称、型号、数量和使用要求，我们将协助确认参数与配置。