测量方法
产品概述与应用
产品说明
Micropole System is one of the smallest complete mass spectrometer systems. Using quadrupole mass spectrometer it monitors trace gases, responds quickly to process shift whilst being easy to install and maintain.
规格参数
| Model | QL-SG02-065-1A / QL-SG02-100-1A / QL-SG02-300-1A |
|---|---|
| Mass Range | m/z 2-65 / m/z 2-100 / m/z 4-300 |
| Mass Filter Type | Qadrupole |
| Detector | Faraday cup |
| Measurement Scan Speed | 50 - 6400 ms/m/z |
| Ionization Voltage | 43eV or 70eV selectable |
| Operating Temperature | 15 - 45°C |
| Operating Humidity | 80%RH or less (not condensing) |
| Storage Temperature | 0 - 80°C |
| Weight (with Special Clamp for SMPA Type Sensor) | 575g |
| Demension | W150 x H62 x D747 (mm) |
| RS485 communication baud rate | 115.2K / 38.4K / 9.6Kbps |
| Analog I/O interface | Input: 0-10V 2ch, Output: 0-10V 4ch |
| Contact I/O | Tool status 3ch, Control signal input 3ch, Set point output 5ch |
| Power input | DC 24V +/-5%, 100mVpp, 50W |
| Connector type | Round type connector: PRC03-23A10-4M |
| Model | MPA8-7-2/65C SMPA8-7-2/65C SMPA8-7-2/65K / MPA8-5-2/100C SMPA8-5-2/100C SMPA8-5-2/100K / SMPA8-1-2/100CR SMPA8-1-2/100KR / MPA8-1-4/300C SMPA8-1-4/300C SMPA8-a-4/300K |
| Measured Upper Limit Pressue (N2)*1 | 0.5Pa / 0.2Pa / 0.1Pa / 0.2Pa |
| Maximum Operating Pressure (N2)*2 | 0.9Pa / 0.6Pa / 0.1Pa / 0.4Pa |
| Minimum Detectable Partial Pressure (N2) | 5.0×10-6Pa (70eV) |
| Resolution (FWHM: N2) | 1.2±0.3 m/z units / 1.0±0.3 m/z units / 1.5±0.3 m/z units / 1.8±0.3 m/z units |
| Maximum Bake out Temperature ( SG removed ) | 350°C |
| Maximum Operating Temperature ( SG installed ) | 150°C |
| Mounting Flange | ISO-KF16 (NW 16), CF34 (ICF 34) |
| Weight | MPA:CF34 Flange 50g SMPA:ISO-KF16 Flange 50g SMPA:CF34 Flange 70g / SMPA:ISO-KF16 Flange 50g SMPA:CF34 Flange 70g / MPA:CF34 Flange 50g SMPA:ISO-KF16 Flange 50g SMPA:CF34 Flange 70g |
| Filament | Y2O3/Ir 2pcs / 3%Re/W 2pcs / Y2O3/Ir 2pcs |
| RoHS | Compliance |
技术参数
| 品牌 | HORIBA |
|---|---|
| 型号/名称 | Micropole System QL 系列 |
| Model | QL-SG02-065-1A / QL-SG02-100-1A / QL-SG02-300-1A |
| Mass Range | m/z 2-65 / m/z 2-100 / m/z 4-300 |
| Mass Filter Type | Qadrupole |
| Detector | Faraday cup |
| Measurement Scan Speed | 50 - 6400 ms/m/z |
| Ionization Voltage | 43eV or 70eV selectable |
| Operating Temperature | 15 - 45°C |
| Operating Humidity | 80%RH or less (not condensing) |
| Storage Temperature | 0 - 80°C |
| Weight (with Special Clamp for SMPA Type Sensor) | 575g |
| Demension | W150 x H62 x D747 (mm) |
| RS485 communication baud rate | 115.2K / 38.4K / 9.6Kbps |
应用咨询
联系科米瑞 咨询仪器选型与报价
提供产品名称、型号、数量和使用要求，我们将协助确认参数与配置。