HEX Steel

THE HEX SERIES HEX CLUSTER HEX MINI HEX UHV APPLICATIONS INSIGHTS Linkedin Youtube The HEX Series Why the HEX Series? HEX vs HEX-L vs HEX-XL HEX Steel Deposition Sources FISSION – Magnetron Sputtering TES – Thermal Boat Evaporation TAU – Electron Beam Evaporation ORCA – Low Temperature Evaporation Sample Stages Glovebox Integration Automation Software Customisations HEX Cluster HEX MINI HEX UHV HEX UHV TAU UHV Applications Thin-Film Solar Cells Optical Coatings Thin-Film Batteries Teaching and Training Reactive Sputtering Sample Preparation Lift-off ITO Coatings Insights Webinars Techniques Articles Videos Testimonials Publications About Us HEX-L Steel beside the HEX Steel THE HEX SERIES Chamber Material To Suit Your Research Although we are strong believers in the benefits of aluminium as the material of choice for a PVD chamber, we realise that there are some benefits to utilising stainless steel chambers: Enhanced chemical and corrosion resistance Higher thermal stability Increased durability Potential to bake out KORVUS TECHNOLOGY Different Material, Same Modularity The HEX Steel is available for both the HEX and HEX-L variants and offers exactly the same modularity as the aluminium-based systems. Each panel is sealed via an o-ring and is detachable. The only significant difference is the securing of the chamber to the electronics rack or base stand due to its increased weight and higher safety concerns. This means that the HEX Steel cannot be mounted as a benchtop system and must remain mounted to the chamber control rack. The integrated rack allows for neater cable management with all water lines, power cables and shutter controllers remaining within the rack width and general footprint. If you believe that your research would benefit from a modular, steel deposition system, please contact us now. KORVUS TECHNOLOGY Customise With Sources Most thin film deposition systems have limited functionality. The HEX series adapts to your needs. We have several deposition sources to customise the sources used in the system, whether you opt for a stainless steel or aluminium chamber. FISSION- Magnetron Sputtering Source Designed for 2″, 3″ and 4″ diameter targets, the sputter sources are equipped with SmCo magnets and accept targets with thickness ranging from 0.5 to 6mm of non-magnetic materials and up to 1mm for magnetic materials. The most flexible source, the FISSION can be paired with DC, RF, HiPIMS, Pulsed-DC and more… Read More ORCA - Low Temperature Evaporation The ORCA organic deposition source is designed to operate between 50 and 600 C to allow sensitive organic materials to be evaporated with precise control. This source can also be used to evaporate low-temperature metals such as Lithium, and pairs well with the glovebox integration of the HEX Series. Read More TAU - Electron Beam Evaporation Our high-accuracy (sub-monolayer) mini E-beam evaporators are ideal for ultra-thin film deposition of high-temperature metals with reliable process control. Material can be evaporated from rods or material held in a crucible. Our novel design allows the material to be co-deposited from four individual pockets. Read More TES - Thermal Boat Evaporation The single thermal boat source from Kovus Technology allows for the integration of a range of thermal boats for the deposition of metals. This allows for an extremely inexpensive, very robust and effective source, the TES is also ideal for those who want to thermally evaporate standard metals. Read More The HEX Series of thin film deposition systems provide a unique, versatile range of deposition options for your research and implementation applications. No matter where your research takes you, the HEX Series will be by your side. At Korvus Technology we take your privacy seriously. Unit 1 Barnes Wallis Court Cressex Business Park Wellington Road, High Wycombe, Buckinghamshire, HP12 3PS sales@korvustech.com +44 1280 852096 © 2026 Korvus Technology | All Rights Reserved | Web Design by JWD