产品概述与应用
产品说明: The Nano-HSZ is a high speed single axis (Z-axis) precision piezo nanopositioning system. Internal position sensors utilizing proprietary PicoQ ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-HSZ offers a compact footprint, ultra low noise characteristics, and a resonant frequency greater than 7 kHz. These characteristics make it ideal for applications that require noise floors less than 10 picometers and/or high speed performance. With the step response time of the Nano-HSZ set to less than 1 millisecond for extremely high speed applications, scan frequencies up to 500Hz can be achieved. Nano-HSZ Position Noise Spectrum
产品特点: Single axis (Z) piezo nanopositionern Step response less than 1 millisecond Scans up to 500 Hz Closed loop control Combine with Nano-OP Series for multi-axis configurations
典型应用: High speed, high resolution positioning Metrology Interferometry
技术规格: Range of motion (Z) 10 μm Resolution 0.01 nm Resonant Frequency 7.5 kHz ±20% Scanning Speed (full amplitude) up to 500 Hz Stiffness 12 N/μm Recommended max. load (horizontal)* 0.1 kg Recommended max. load (vertical)* 0.1 kg Body Material Al, Invar or Titanium Controller Nano-Drive ® * Larger load requirements should be discussed with our engineering staff. Addit
技术参数
| 型号 | Nano-HSZ |
|---|---|
| 品牌 | Mad City Labs |
| 产品特点 | Single axis (Z) piezo nanopositionern Step response less than 1 millisecond Scans up to 500 Hz Closed loop control Combine with Nano-OP Series for multi-axis configurations |
| 典型应用 | High speed, high resolution positioning Metrology Interferometry |
| 技术规格 | Range of motion (Z) 10 μm Resolution 0.01 nm Resonant Frequency 7.5 kHz ±20% Scanning Speed (full amplitude) up to 500 Hz Stiffness 12 N/μm Recommended max. load (horizontal)* 0.1 kg Recommended max. load (vertical)* 0.1 kg Body Material Al, Invar or |
| 控制方式 | Closed loop control |
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