产品概述与应用
产品说明: The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.
产品特点: Long range single axis piezo nanopositioner Less than 5 nm out of plane motion Low profile design Closed loop control
典型应用: Surface metrology Wafer scanning and alignment Optical alignment
技术规格: Range of motion (X) 200 μm Resolution 0.4 nm Resonant Frequency 500 Hz ±20% Resonant Frequency (100g load) 200 Hz ±20% Stiffness 0.2 N/μm θ roll , θ pitch (typical) ≤0.3 μrad θ yaw (typical) ≤0.3 μrad Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Al Controller Nano-Drive ® * Larger load requirements should be discussed with our engineering staff. Nano-LR200 Nano-LR200 Nano-OP Series Nano-YT500
技术参数
| 型号 | Nano-LR200 |
|---|---|
| 品牌 | Mad City Labs |
| 产品特点 | Long range single axis piezo nanopositioner Less than 5 nm out of plane motion Low profile design Closed loop control |
| 典型应用 | Surface metrology Wafer scanning and alignment Optical alignment |
| 技术规格 | Range of motion (X) 200 μm Resolution 0.4 nm Resonant Frequency 500 Hz ±20% Resonant Frequency (100g load) 200 Hz ±20% Stiffness 0.2 N/μm θ roll , θ pitch (typical) ≤0.3 μrad θ yaw (typical) ≤0.3 μrad Recommended max. load (horizontal)* 0.5 kg Recomm |
| 控制方式 | Closed loop control |
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