产品概述与应用
产品说明: The Nano-M250 is a compact, two axis piezo nanopositioning system constructed from aluminum. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models. Custom modifications, including range of motion, are available. Contact your local sales office for more information.
产品特点: Compact piezo nanopositioner Two axis motion 50 μm x 50 μm ranges of motion Closed loop control
典型应用: Alignment Nanolithography Scanning microscopy
技术规格: Range of motion (XY) 50 μm x 50 μm Resolution 0.1 nm Resonant Frequency (X) 370 Hz ±20% Resonant Frequency (Y) 300 Hz ±20% Stiffness 1.0 N/μm θ roll , θ pitch (typical) ≤1 μrad θ yaw (typical) ≤3 μrad Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Aluminum Controller Nano-Drive ® * Larger load requirements should be discussed with our engineering staff. Nano-M250 Nano-M250 Nano-SPM200 Nano-M350 Nano-Man5 Nano-M3Z Nano-MZ Accessories S
技术参数
| 型号 | Nano-M250 |
|---|---|
| 品牌 | Mad City Labs |
| 产品特点 | Compact piezo nanopositioner Two axis motion 50 μm x 50 μm ranges of motion Closed loop control |
| 典型应用 | Alignment Nanolithography Scanning microscopy |
| 技术规格 | Range of motion (XY) 50 μm x 50 μm Resolution 0.1 nm Resonant Frequency (X) 370 Hz ±20% Resonant Frequency (Y) 300 Hz ±20% Stiffness 1.0 N/μm θ roll , θ pitch (typical) ≤1 μrad θ yaw (typical) ≤3 μrad Recommended max. load (horizontal)* 0.5 kg Recomm |
| 控制方式 | Closed loop control |
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