产品概述与应用
产品说明: The Nano-M350 is a compact three axis (X, Y, Z) piezo nanopositioning system constructed from aluminum. The XY travel range is 50 μm and 20 μm in the Z axis under closed loop control. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography, SEM. Internal position sensors utilizing proprietary PicoQ ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 has been designed for high speed performance in the Z-axis while maintaining high precision motion and is also available in high vacuum (non-bakeable) compatible models.
产品特点: Compact piezo nanopositioner Three axis motion (XYZ) 50 μm x 50 μm x 20 μm ranges of motion Closed loop control
典型应用: Alignment MEMS Nanolithography SEM
技术规格: Range of motion (X) 50 μm Range of motion (Y) 50 μm Range of motion (Z) 20 μm Resolution (20/50 μm) 0.04/0.1 nm Resonant Frequency (X) 285 Hz ±20% Resonant Frequency (Y) 285 Hz ±20% Resonant Frequency (Z) 1580 Hz ±20% θ roll , θ pitch (typical) ≤1 μrad θ yaw (typical) ≤3 μrad Recommended max. load (horizontal)* 0.5 kg Recommended max. load (vertical)* 0.2 kg Body Material Auminum Controller Nano-Drive ® * Larger load requirements should be discussed with our engineering staff. Additio
技术参数
| 型号 | Nano-M350 |
|---|---|
| 品牌 | Mad City Labs |
| 产品特点 | Compact piezo nanopositioner Three axis motion (XYZ) 50 μm x 50 μm x 20 μm ranges of motion Closed loop control |
| 典型应用 | Alignment MEMS Nanolithography SEM |
| 技术规格 | Range of motion (X) 50 μm Range of motion (Y) 50 μm Range of motion (Z) 20 μm Resolution (20/50 μm) 0.04/0.1 nm Resonant Frequency (X) 285 Hz ±20% Resonant Frequency (Y) 285 Hz ±20% Resonant Frequency (Z) 1580 Hz ±20% θ roll , θ pitch (typical) ≤1 μr |
| 控制方式 | Closed loop control |
咨询仪器选型与报价
提供产品名称、型号、数量和使用要求，我们将协助确认参数与配置。