Transform® Series
Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
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Beneq Transform® XP combines mini-batch thermal ALD, plasma-enhanced ALD with a proprietary in-cycle annealing step to deliver uniform films, stable interfaces, and high-quality material properties for advanced power and RF devices.
Beneq Transform®
Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
Beneq Transform® 300
Beneq Transform® 300 combines thermal and plasma ALD in an integrated 300 mm cluster tool for MtM applications including CIS, Power, Micro-OLED/LED, and Advanced Packaging.
| 型号或系列 | Transform® Series |
|---|---|
| 产品类别 | Semiconductor ALD system |
| 包含型号 | Beneq Transform |
| Wafer size | 300 mm cluster tool for MtM applications including CIS, Power, Micro-OLED/LED, and Adv |
| Application | rfaces, and high-quality material properties for advanced power and RF devices |
| Process type | thermal ALD, plasma-enhanced ALD with a proprietary in-cycle annealing step to deliver uniform films, stable in |
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