Beneq Transform® Series
Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
- 型号或系列
- Transform® Series
- 产品类别
- Semiconductor ALD system
- 包含型号
- Beneq Transform
- Wafer size
- 300 mm cluster tool for MtM applications including CIS, Power, Micro-OLED/LED, and Adv