LuXpector THEA
LuXpector THEA
Cost-Efficient Operation: Reduced total cost of ownership (TCO) through intelligent design, modular components, and low maintenance requirements.
广西科米瑞实验仪器设备有限公司提供 PVA TePla LuXpector THEA 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
Wafer Inspection
Ellipsometry
Cost-Efficient Operation: Reduced total cost of ownership (TCO) through intelligent design, modular components, and low maintenance requirements.
Serviceability Built In: Modular design, remote support, and low‑maintenance hardware ensure high uptime and easy servicing.
User-Friendly Interface: Easy operation is ensured through an intuitive interface with automated calibration and analysis, even without ellipsometry experience.
Flexible Integration: Ideal for R&D or integration into production lines, with support for SEMI automation and SECS/GEM.
No Backside Reflection: (SiC) Accurate thin-film analysis on SiC wafers, eliminating errors from backside reflections for reliable results.
AlGaN Concentration: Accurate aluminum content determination in AlGaN layers through advanced band edge analysis.
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规格
| Model / product family | LuXpector THEA |
|---|---|
| 产品类别 | Wafer Inspection / Ellipsometry |
| Footprint | 2,500 x 1,520 mm (incl. FOUPs) |
| Electrical connection | 230 V, 50-60 Hz, 2,5 kVA |
| Installation conditions | VC-D |
| Connection type compressed dry air CDA | 8 mm soft-polyurethane tubing |
| Operating pressure CDA | 70 kPa to 80 kPa |
| Connection type vacuum | 8 mm soft-polyurethane tubing |
| Operating pressure vacuum | -70 kPa to -80 kPa |
| Sound emission in operation | < 70 dB(A) |
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