
LuXpector THEA
Cost-Efficient Operation: Reduced total cost of ownership (TCO) through intelligent design, modular components, and low maintenance requirements.
- Model / product family
- LuXpector THEA
- 产品类别
- Wafer Inspection / Ellipsometry
- Footprint
- 2,500 x 1,520 mm (incl. FOUPs)
- Electrical connection
- 230 V, 50-60 Hz, 2,5 kVA