
Wafer Surface Measurement System
Vapor Phase Decomposition。Features at a glance。All media, from process chemicals to ICP-MS calibration, are supplied fully automatically by the system.
- Model / product family
- Wafer Surface Measurement System
- 产品类别
- Wafer Inspection / Vapor Phase Decomposition
- Wafer sizes
- 4" - 12"
- Surfaces
- Hydrophobic/hydrophilic/bevel/upper bevel
