Wafer Surface Measurement System
Vapor Phase Decomposition。Features at a glance。All media, from process chemicals to ICP-MS calibration, are supplied fully automatically by the system.
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Wafer Inspection
Vapor Phase Decomposition
Features at a glance
All media, from process chemicals to ICP-MS calibration, are supplied fully automatically by the system.
Fully automated rinsing and cleaning cycles.
Risks to personnel and products from contamination and operating errors are minimized.
Reduced personnel costs: The central host computer controls the entire system, enables remote operation or control via SECS/GEM of all components, and provides real-time results.
Interested in WSMS
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