Wafer Surface Preparation System
Vapor Phase Decomposition。Features at a glance。Layout for maximum robustness against cross-contamination.
广西科米瑞实验仪器设备有限公司提供 PVA TePla Wafer Surface Preparation System 产品资料、选型咨询、供货报价和售后服务支持,价格面议。
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Wafer Inspection
Vapor Phase Decomposition
Features at a glance
Layout for maximum robustness against cross-contamination.
Depending on requirements, a highly automated workflow of the entire process chain under cleanroom conditions is possible, utilizing loading stations, handling robots, intermediate storage devices, and media supply systems.
Centralized control of the entire system, from job management and recipe definition to the recording of all data.
Remote access for control and monitoring purposes is available.
Interested in WSPS
| Model / product family | Wafer Surface Preparation System |
|---|---|
| 产品类别 | Wafer Inspection / Vapor Phase Decomposition |
| Wafer sizes | 4" - 12" |
| Surfaces | Hydrophobic/hydrophilic/bevel/upper bevel |
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