Beneq Prodigy™
Learn the technical specifications of the Beneq Prodigy™, such as dimensions, process types, processing temperature range, and substrate types.
- 型号或系列
- Prodigy™
- 产品类别
- Compound semiconductor ALD batch tool
- 尺寸
- 3500 x 2500 mm
- Max Batch Load
- 150 mm x 50 wafers, 100 mm x 75 wafers