Plasma Batch Type Systems
Plasma Batch Type Systems
Plasma Surface Treatment。Plasma Backend。Configurations。GIGA 690。GIGA 690 Inline。GIGA 690 Autofab。The versatile GIGA 690 is a reliable batch backend tool. It is used as a comm
广西科米瑞实验仪器设备有限公司提供 PVA TePla Plasma Batch Type Systems 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
Plasma Surface Treatment
Plasma Backend
Configurations
GIGA 690
GIGA 690 Inline
GIGA 690 Autofab
The versatile GIGA 690 is a reliable batch backend tool. It is used as a common platform to cover different tasks, from a standalone single solution up to fully automated cluster system.
.
Applications
GIGA 690, GIGA 690IL and GIGA 690 Autofab
BGAs, lead frames, PCBs and wafers
Activation before molding, underfill, coating
Cleaning before wire bond
Pre flip chip underfill
Pre solder ball attach
Substrate & wafer cleaning / activation
Up to 6 magazines batch processing
Substrate cleaning / activation of alternative products like sensors, medical components and other parts
GIGA 690 and GIGA 690 Inline
Flexibility: broad spectrum of applications and possibilities
GHz plasma, aluminium chamber, ceramic window
No electrodes inside chamber
2 different chamber sizes (64 or 91 litres)
GIGA 690 AutoFab
规格
| Model / product family | Plasma Batch Type Systems |
|---|---|
| 产品类别 | Plasma Surface Treatment / Plasma Backend |
| 功率 | Different voltages and frequencies available |
| Process gas | ¼“ Swagelok-connector, input pressure 1 - 2 bar |
| Inner Dimension (WxHxD) | 400 x 400 x 400 mm (optional 450 x 450 x 450 mm) |
| Compressed air | Connector 6 mm Festo, input pressure 4 - 6 bar, oil free |
| Dimensions (WxHxD) | 1,050 mm x 1,720 mm (1,950 mm incl. light tower) x 815 mm |
| 重量 | 195 kg (445 kg incl. vacuum pump) |
| Technical data set 2 - Power | Different voltages and frequencies available |
| Technical data set 2 - Process gas | ¼“ Swagelok-connector |
| Technical data set 2 - Compressed air | Connector 6 mm Festo, input pressure 4 - 6 bar, oil free |
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