VEgauge

Thin Film Inspection

Built around your process

Fully customizable inline inspection system for macroscopic and microscopic surface inspection

Spatial resolution from sub-µm up to the meter range, tailored to your specific process requirements

Field of view, sample size, and system dimensions defined by your production setup

Near real-time evaluation for fast process feedback

Non-destructive, full-surface (100%) inspection of thin films, defects, contaminations, and surface roughness

Layer analysis from 1 nm to 500 µm, configured for your material stack

Substrate-specific calibration: semiconductors, metals, polymers, ceramics, glass and more

Scalable for parallel production lines: deploy multiple systems simultaneously, each individually configured

Seamless integration into existing production workflows

Centralised data management and control via VEsolve ® pro software

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