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提交选型需求A-311.FXx、A-311.GXx，尺寸单位是mm。A-311.Axx、A-311.Bxx、A-311.Cxx、A-311.Dxx，尺寸单位为mm。带空气轴承的高精度PIglide IS XY 平面扫描仪采用扁平设计，可用于替代堆叠XY位移平台
PIglide HS平面扫描仪带多个磁性线性电机和一个绝对编码器，并采用真空预载：非接触式无摩擦运动可实现较高精度和可靠性。
行程为305mm×305mm（12''）。20000次脉冲/分辨率的旋转编码器。L-741.13x1xx，尺寸单位为mm。非接触式光学直线光栅尺以高精度直接在平台上测量位置
行程为102毫米×102毫米(4")。三相磁性直接驱动器在动力传动系统中未使用机械零件，其可直接将驱动力传输至运动平台，且无摩擦。无铁芯电机非常适合对精度有超高要求的定位任务，因为其不会与永久性磁铁发生不良作用
XY系统由两个 V-417 定位器组成，行程为204至407毫米。适用的带ACS驱动器模块的 G-901 ACS控制器。Z轴选配件：行程为102毫米的 L-412 定位器
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