SPECTROS™ 150 Organic Thin Film Deposition & Metallization System up to 150mm x 150mm Substrate

：Automate Your Lab.

：The Kurt J. Lesker Company ® SPECTROS™ 150 is the next generation thin film deposition system based on the workhorse SPECTROS platform. With more than 100 units in service worldwide, the SPECTROS platform is a proven, robust, and versatile design. The SPECTROS builds on the successes of the original design with improved system base pressures and pump down times. A technically superior chamber design, an industry best software control system with advanced programming capability, real time recipe thread operation, and numerous features for optimized thin film performance are a few of the key advantages offered in this innovative, best of class design.

：The SPECTROS 150 is compatible with the following techniques:

：1cc or 10cc LTE Sources (up to 10 sources in addition to thermal sources)

：4" Thermal Sources (up to 4 Sources in addition to LTE Sources)

：TORUS ® Magnetron Sputtering sources (up to eight 2" or 3" sources)

：Electron Beam Evaporation Source (4 pocket 8cc, 8 pocket 12cc, 6 pocket 20cc)

：Combinations of the above techniques are also available

：Custom configurations are available upon request

：KJLC's software allows user friendly recipe creation along with a reliable, uninterruptable processing module that allows process completion, regardless of the state of the computer user interface. For more information on this intuitive, unique, and reliable software package, please see the Software Tab .

：SPECTROS™ 150

：Imperial College of London's Study

：Brooks CTI8F Cryo Pump

：Edwards nXDS10i Scroll Pump

：KJLC KL6 E-Beam Source

：KJLC TORUS LTE Evaporation Source

：KJLC RF03 Power Supply

：KJLC RF06 Power Supply

：Contact Global Process Equipment Service and Support for assistance with KJLC Systems by clicking here .

：Modular Process Chamber

：Box Shaped 304L Stainless Steel chamber: 19.25" wide x 20.5" deep x 36" high (488.95mm wide x 520.7mm deep x 914.4mm high), internal dimensions.

：This chamber comes standard with up to ten spare ports (2-3/4" CF) depending on system configuration.