Super-SPECTROS™ 200 Organic Thin Film Deposition & Metallization System up to 200mm x 200mm Substrate

：Automate Your Lab.

：Optimized for organic material deposition

：Up to 12 LTE sources; 1cc, 10cc or 35cc capacity

：Host to dopant ratio 1000:1

：Up to 4 thermal evaporation sources

：Substrate shutter

：Automatic substrate, mask storage and exchange

：Pyrometer port

：Glovebox interfaceable design with sliding front door and sliding rear door

：KJLC eKLipse™ control software

：Rate control resolution 0.05Å/s

：Recipe based PC based system controls

：Cryopump high vacuum pumping

：2-position gate valve

：Imperial College of London's Study

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：Wedge tool for shaped film growth

：Co-deposition

：Electron beam source

：Twelve source thermal evaporation source array

：Caesium, Selenium, or HTE source

：Load lock chamber